Publication:
Technology challenges for the microelectronics end-of-the-roadmap triggering global research
Date
| dc.contributor.author | Claeys, Cor | |
| dc.date.accessioned | 2021-10-14T21:14:46Z | |
| dc.date.available | 2021-10-14T21:14:46Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6114 | |
| dc.source.conference | 3rd Workshop on Development in Microelectronics - Role of VLSI in MEMS | |
| dc.source.conferencedate | 4/12/2002 | |
| dc.source.conferencelocation | New Delhi India | |
| dc.title | Technology challenges for the microelectronics end-of-the-roadmap triggering global research | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
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