Publication:
New wet process strategies for reduced La2O3 and MgO2 high-k cap-dielectric loss
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1930 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-19
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Statistics
Views
1930 since deposited on 2021-10-18
2last month
Acq. date: 2026-08-19
Citations