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Using a biased-ICP reactor for PR strip and Cu barrier removal

Date

2004
Journal article
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dc.contributor.authorVan Cauwenberghe, Marc
dc.contributor.authorMannaert, Geert
dc.contributor.authorBoullart, Werner
dc.contributor.authorHendrickx, Dirk
dc.contributor.authorSchmidt, M.O.
dc.contributor.imecauthorVan Cauwenberghe, Marc
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorHendrickx, Dirk
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.accessioned2021-10-15T16:50:42Z
dc.date.available2021-10-15T16:50:42Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9715
dc.source.beginpageS11
dc.source.endpageS13
dc.source.issue4
dc.source.journalSolid State Technology
dc.source.volume47
dc.title

Using a biased-ICP reactor for PR strip and Cu barrier removal

dc.typeJournal article
dspace.entity.typePublication
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