Publication:

A novel method to measure the internal pressure of MEMS thin-film packages

Date

2013
Journal article
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dc.contributor.authorWang, Bo
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorWevers, Martine
dc.contributor.imecauthorWang, Bo
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-21T14:25:01Z
dc.date.available2021-10-21T14:25:01Z
dc.date.issued2013
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23371
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0026271413002746
dc.source.beginpage1663
dc.source.endpage1666
dc.source.issue9_11
dc.source.journalMicroelectronics Reliability
dc.source.volume53
dc.title

A novel method to measure the internal pressure of MEMS thin-film packages

dc.typeJournal article
dspace.entity.typePublication
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