Publication:
Effect of implantation oxide on the silicidation of narrow diffused and poly-lines
Date
| dc.contributor.author | Naem, Abdalla | |
| dc.contributor.author | Lauwers, A. | |
| dc.contributor.author | de Potter de ten Broeck, Muriel | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | de Potter de ten Broeck, Muriel | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-09-30T09:19:59Z | |
| dc.date.available | 2021-09-30T09:19:59Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2046 | |
| dc.source.conference | Materials Research Society 1997 Spring Meeting : Symposium on Multilevel Metal Process Integration; April 1-2, 1997; San Francis | |
| dc.source.conferencelocation | ||
| dc.title | Effect of implantation oxide on the silicidation of narrow diffused and poly-lines | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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