Publication:

Trapping in 1nm EOT high-k / MG

Date

2008
Proceedings Paper
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Author(s)

Zahid, Mohammed
;
Pantisano, Luigi
;
Degraeve, Robin  
;
Aoulaiche, Marc
;
Trojman, Lionel
;
Ferain, Isabelle
;
san andres, e
;
Shickova, Adelina
;
O'Connor, Robert
;
Groeseneken, Guido  
;
Heyns, Marc  
;
De Gendt, Stefan  

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Abstract

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