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SiCP selective epitaxial growth in recessed source/drain regions yielding to drive current enhancement in n-channel MOSFET

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1876 since deposited on 2021-10-17
1last month
Acq. date: 2026-01-26

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1876 since deposited on 2021-10-17
1last month
Acq. date: 2026-01-26

Citations