Publication:
Formation of (Nd,Y)-silicides by sequential channeled implantation of Y and Nd ions
Date
| dc.contributor.author | Jin, Sing | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Wu, Ming Fang | |
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.author | Langouche, G. | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.date.accessioned | 2021-10-14T13:07:14Z | |
| dc.date.available | 2021-10-14T13:07:14Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4457 | |
| dc.source.beginpage | 349 | |
| dc.source.endpage | 354 | |
| dc.source.issue | 3 | |
| dc.source.journal | Nuclear Instruments and Methods B | |
| dc.source.volume | B160 | |
| dc.title | Formation of (Nd,Y)-silicides by sequential channeled implantation of Y and Nd ions | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |