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Stress induced densification of thin porous low-k films during nanoindentation
Publication:
Stress induced densification of thin porous low-k films during nanoindentation
Date
2018
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Okudur, Oguzhan Orkut
;
Redzheb, Murad
;
Vanstreels, Kris
;
Zahedmanesh, Houman
;
Gonzalez, Mario
;
De Wolf, Ingrid
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1933
since deposited on 2021-10-26
403
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1933
since deposited on 2021-10-26
403
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations