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Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse

Date

2011
Proceedings Paper
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dc.contributor.authorVos, Ingrid
dc.contributor.authorHellin, David
dc.contributor.authorVertommen, Johan
dc.contributor.authorDemand, Marc
dc.contributor.authorBoullart, Werner
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.accessioned2021-10-19T21:32:32Z
dc.date.available2021-10-19T21:32:32Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20117
dc.source.beginpage189
dc.source.conferenceSemiconductor Cleaning Science and Technology 12
dc.source.conferencedate10/10/2011
dc.source.conferencelocationBoston, MA USA
dc.source.endpage196
dc.title

Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse

dc.typeProceedings paper
dspace.entity.typePublication
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