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Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulation
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Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulation
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Herfurth, Norbert
;
Wu, Chen
;
Beureuther, A.
;
Nakamura, T.
;
De Wolf, Ingrid
;
Simon-Najasek, M.
;
Altmann, Frank
;
Croes, Kristof
;
Boit, Christian
Journal
Microelectronics Reliability
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1946
since deposited on 2021-10-27
Acq. date: 2026-01-06
Citations
Metrics
Views
1946
since deposited on 2021-10-27
Acq. date: 2026-01-06
Citations