Publication:
The role of argon plasma etching species on ultrathin extreme ultraviolet resists
Date
| dc.contributor.advisor | De Gendt, Stefan | |
| dc.contributor.advisor | Witting Larsen, Esben | |
| dc.contributor.advisor | Petersen, John | |
| dc.contributor.author | Sharma, Arvind | |
| dc.date.accessioned | 2025-10-28T11:17:10Z | |
| dc.date.available | 2025-10-28T11:17:10Z | |
| dc.date.issued | 2025-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/58349 | |
| dc.title | The role of argon plasma etching species on ultrathin extreme ultraviolet resists | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |