Publication:
Role of hydrogen in separation of porous Si layer in a layer transfer process
Date
| dc.contributor.author | Bilyalov, Renat | |
| dc.contributor.author | Solanki, Chetan Singh | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Ulyashin, A. | |
| dc.contributor.author | Job, R. | |
| dc.contributor.author | Fahrne, W. | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-15T04:01:41Z | |
| dc.date.available | 2021-10-15T04:01:41Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7217 | |
| dc.source.beginpage | 128 | |
| dc.source.endpage | 131 | |
| dc.source.issue | 1 | |
| dc.source.journal | Physica Status Solidi A | |
| dc.source.volume | 197 | |
| dc.title | Role of hydrogen in separation of porous Si layer in a layer transfer process | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |