Publication:

Shrinking solid-state nanopores using electron-beam induced deposition

Date

2009
Journal article
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dc.contributor.authorKox, Ronald
dc.contributor.authorChen, Chang
dc.contributor.authorMaes, Guido
dc.contributor.authorLagae, Liesbet
dc.contributor.authorBorghs, Gustaaf
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorBorghs, Gustaaf
dc.date.accessioned2021-10-17T23:35:24Z
dc.date.available2021-10-17T23:35:24Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.issn0957-4484
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15623
dc.identifier.urlhttp://www.iop.org/EJ/article/0957-4484/20/11/115302/nano9_11_115302.pdf
dc.source.beginpage115302
dc.source.issue11
dc.source.journalNanotechnology
dc.source.volume20
dc.title

Shrinking solid-state nanopores using electron-beam induced deposition

dc.typeJournal article
dspace.entity.typePublication
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