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Ultra-long-term reliable ensapsulation using an atomic layer deposited HfO2/Al2O3/HfO2 triple-interlayer for biomedical implant
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1998 since deposited on 2021-10-27
Acq. date: 2025-12-12
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Metrics
Views
1998 since deposited on 2021-10-27
Acq. date: 2025-12-12
Citations