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Ultra-long-term reliable ensapsulation using an atomic layer deposited HfO2/Al2O3/HfO2 triple-interlayer for biomedical implant
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Ultra-long-term reliable ensapsulation using an atomic layer deposited HfO2/Al2O3/HfO2 triple-interlayer for biomedical implant
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Li, Changzheng
;
Cauwe, Maarten
;
Yang, Yang
;
Schaubroeck, David
;
Mader, Lothar
;
Op de Beeck, Maaike
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2001
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Acq. date: 2026-02-24
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Views
2001
since deposited on 2021-10-27
3
last month
1
last week
Acq. date: 2026-02-24
Citations