Publication:
Stress and mechanical constants characterizations of phase-change SbTe-alloys: influence of the film thickness and substrate
Date
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Gille, Thomas | |
| dc.contributor.author | Goux, Ludovic | |
| dc.contributor.author | Delhougne, Romain | |
| dc.contributor.author | Attenborough, Karen | |
| dc.contributor.author | Wouters, Dirk | |
| dc.contributor.imecauthor | Goux, Ludovic | |
| dc.contributor.imecauthor | Delhougne, Romain | |
| dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
| dc.date.accessioned | 2021-10-16T17:34:04Z | |
| dc.date.available | 2021-10-16T17:34:04Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12498 | |
| dc.source.beginpage | I12.6 | |
| dc.source.conference | Materials and Processes for Nonvolatile Memories II | |
| dc.source.conferencedate | 9/04/2007 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Stress and mechanical constants characterizations of phase-change SbTe-alloys: influence of the film thickness and substrate | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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