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Conference contributions
Ultra low-k materials: challenges of scaling
Publication:
Ultra low-k materials: challenges of scaling
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Date
2010
Meeting abstract
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20651.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Larry
;
Baklanov, Mikhaïl
;
Pantouvaki, Marianna
;
Tokei, Zsolt
;
Beyer, Gerald
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Abstract
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1853
since deposited on 2021-10-19
Acq. date: 2025-12-16
Citations
Metrics
Views
1853
since deposited on 2021-10-19
Acq. date: 2025-12-16
Citations