Publication:

The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films

Date

2024
Journal article
https://doi.org/10.1016/j.actamat.2023.119548
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dc.contributor.authorMary Joy, Rani
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorBaule, Nina
dc.contributor.authorBai, Shengyuan
dc.contributor.authorJannis, Daen
dc.contributor.authorGauquelin, Nicolas
dc.contributor.authorPinault-Thaury, Marie-Amandine
dc.contributor.authorJomard, Francois
dc.contributor.authorSankaran, Kamatchi Jothiramalingam
dc.contributor.authorRouzbahani Bayatani, Rozita
dc.contributor.authorLloret, Fernando
dc.contributor.authorDesta, Derese
dc.contributor.authorD'Haen, Jan
dc.contributor.authorVerbeeck, Johan
dc.contributor.authorBecker, Michael Frank
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorSankaran, Kamatchi Jothiramalingam
dc.contributor.imecauthorLloret, Fernando
dc.contributor.imecauthorDesta, Derese
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.imecauthorMary Joy, Rani
dc.contributor.imecauthorRouzbahani Bayatani, Rozita
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecDesta, Derese::0000-0001-6485-6826
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.contributor.orcidimecMary Joy, Rani::0000-0001-8741-4908
dc.contributor.orcidimecRouzbahani Bayatani, Rozita::0000-0001-5528-1434
dc.date.accessioned2024-02-05T10:10:40Z
dc.date.available2023-12-31T17:21:39Z
dc.date.available2024-02-05T10:10:40Z
dc.date.embargo2024-06-23
dc.date.issued2024
dc.description.wosFundingTextThis work was financially supported by the Special Research Fund (BOF) via Methusalem NANO network, the Research Foundation - Flanders (FWO) via Project G0D4920N, and the CORNET project nr 263-EN "ULTRAHARD: Ultrahard optical diamond coatings" (2020-2021).
dc.identifier.doi10.1016/j.actamat.2023.119548
dc.identifier.issn1359-6454
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43331
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD
dc.source.beginpage119548
dc.source.endpageNA
dc.source.issuena
dc.source.journalACTA MATERIALIA
dc.source.numberofpages8
dc.source.volume264
dc.subject.keywordsCHEMICAL-VAPOR-DEPOSITION
dc.subject.keywordsLARGE-AREA DEPOSITION
dc.subject.keywordsMICROWAVE-PLASMA
dc.subject.keywordsLOW-TEMPERATURE
dc.subject.keywordsINTRINSIC STRESS
dc.subject.keywordsRESIDUAL-STRESS
dc.subject.keywordsYOUNGS MODULUS
dc.subject.keywordsACOUSTIC-WAVES
dc.subject.keywordsULTRA-THIN
dc.subject.keywordsLASER
dc.title

The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films

dc.typeJournal article
dspace.entity.typePublication
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