Publication:
The use of functionally graded poly-SiGe layers for MEMS applications
Date
| dc.contributor.author | Witvrouw, Ann | |
| dc.date.accessioned | 2021-10-15T17:57:33Z | |
| dc.date.available | 2021-10-15T17:57:33Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9925 | |
| dc.source.conference | FGM - Multifunctional and Functionally Graded Materials | |
| dc.source.conferencedate | 11/07/2004 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.title | The use of functionally graded poly-SiGe layers for MEMS applications | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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