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Focused-ion-beam lithogtaphy for prototyping of silicon photonic components

Date

2008
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dc.contributor.authorSchrauwen, Jonathan
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-17T10:36:17Z
dc.date.available2021-10-17T10:36:17Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14446
dc.source.conference52nd International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication - EIPBN
dc.source.conferencedate27/05/2008
dc.source.conferencelocationPortland, OR USA
dc.title

Focused-ion-beam lithogtaphy for prototyping of silicon photonic components

dc.typeOral presentation
dspace.entity.typePublication
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