Publication:
4X reticles with 3% linewidth control for the development of 0.18 µm lithography
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2043 since deposited on 2021-09-29
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Acq. date: 2026-01-08
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2043 since deposited on 2021-09-29
1last month
1last week
Acq. date: 2026-01-08
Citations