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Measuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniques
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Measuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniques
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Date
2009
Proceedings Paper
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19202.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Stoffels, Steve
;
Boedecker, Sebastian
;
Puers, Bob
;
De Wolf, Ingrid
;
Tilmans, Harrie
;
Rembe, Christian
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1770
since deposited on 2021-10-18
Acq. date: 2026-07-15
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Views
1770
since deposited on 2021-10-18
Acq. date: 2026-07-15
Citations