Simulations and measurements of capacitance in dielectric stacks and consequences for integration

dc.contributor.author	De Roest, David
dc.contributor.author	Donaton, R. A.
dc.contributor.author	Stucchi, Michele
dc.contributor.author	Maex, Karen
dc.contributor.author	Nauwelaers, Bart
dc.contributor.imecauthor	De Roest, David
dc.contributor.imecauthor	Stucchi, Michele
dc.contributor.imecauthor	Maex, Karen
dc.contributor.imecauthor	Nauwelaers, Bart
dc.date.accessioned	2021-10-14T16:46:39Z
dc.date.available	2021-10-14T16:46:39Z
dc.date.issued	2001
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/5202
dc.source.beginpage	29
dc.source.endpage	35
dc.source.issue	1_4
dc.source.journal	Microelectronic Engineering
dc.source.volume	55
dc.title	Simulations and measurements of capacitance in dielectric stacks and consequences for integration
dc.type	Journal article
dspace.entity.type	Publication
Files
Publication available in collections:	Articles