Publication:

Structural analysis of TSVs

Date

2010
Presentation
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dc.contributor.authorBender, Hugo
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorGeypen, Jef
dc.contributor.authorRichard, Olivier
dc.contributor.authorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorFavia, Paola
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.date.accessioned2021-10-18T15:20:06Z
dc.date.available2021-10-18T15:20:06Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16733
dc.source.conferenceEuropen Focused Ion Beam Users Group Meeting
dc.source.conferencedate11/10/2010
dc.source.conferencelocationGaeta Italy
dc.title

Structural analysis of TSVs

dc.typeOral presentation
dspace.entity.typePublication
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