Potential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAs

dc.contributor.author	Cuduvally, Ramya
dc.contributor.author	Morris, Richard
dc.contributor.author	Ferrari, Piero
dc.contributor.author	Bogdanowicz, Janusz
dc.contributor.author	Fleischmann, Claudia
dc.contributor.author	Melkonyan, Davit
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Cuduvally, Ramya
dc.contributor.imecauthor	Morris, Richard
dc.contributor.imecauthor	Bogdanowicz, Janusz
dc.contributor.imecauthor	Fleischmann, Claudia
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Morris, Richard::0000-0002-0902-7088
dc.contributor.orcidimec	Bogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimec	Fleischmann, Claudia::0000-0003-1531-6916
dc.date.accessioned	2021-10-28T20:53:29Z
dc.date.available	2021-10-28T20:53:29Z
dc.date.issued	2020
dc.identifier.issn	0304-3991
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/34944
dc.identifier.url	https://doi.org/10.1016/j.ultramic.2019.112918
dc.source.beginpage	112918
dc.source.journal	Ultramicroscopy
dc.source.volume	210
dc.title	Potential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAs
dc.type	Journal article
dspace.entity.type	Publication
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