Publication:

Effect of hydrogenation on misfit dislocations in SiGe/Si structures

Date

1998
Journal article
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dc.contributor.authorDaami, A.
dc.contributor.authorBremond, G.
dc.contributor.authorCaymax, Matty
dc.contributor.authorPoortmans, Jef
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.accessioned2021-09-30T11:38:22Z
dc.date.available2021-09-30T11:38:22Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2473
dc.source.beginpage1737
dc.source.endpage1739
dc.source.issue3
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume16
dc.title

Effect of hydrogenation on misfit dislocations in SiGe/Si structures

dc.typeJournal article
dspace.entity.typePublication
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