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Experimental studies of dose retention and activation in FinFet-based structures

Date

2009
Proceedings Paper
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dc.contributor.authorMody, Jay
dc.contributor.authorDuffy, Ray
dc.contributor.authorEyben, Pierre
dc.contributor.authorGoossens, Jozefien
dc.contributor.authorMoussa, Alain
dc.contributor.authorPolspoel, Wouter
dc.contributor.authorBerghmans, Bart
dc.contributor.authorVan Dal, Mark
dc.contributor.authorPawlak, Bartek
dc.contributor.authorKaiser, Monja
dc.contributor.authorWeemaes, Robbert
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-18T00:54:25Z
dc.date.available2021-10-18T00:54:25Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15879
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
dc.title

Experimental studies of dose retention and activation in FinFet-based structures

dc.typeProceedings paper
dspace.entity.typePublication
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