Publication:

The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes

Date

1997
Proceedings Paper
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dc.contributor.authorVerhaegen, Katarina
dc.contributor.authorBaert, Kris
dc.contributor.authorSansen, Willy
dc.contributor.authorHermans, Lou
dc.contributor.authorMertens, Robert
dc.contributor.imecauthorMertens, Robert
dc.date.accessioned2021-09-30T10:02:10Z
dc.date.available2021-09-30T10:02:10Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2286
dc.source.beginpage1423
dc.source.conferenceInternational Conference on Solid-State Sensors and Actuators - Transducers
dc.source.conferencedate16/06/1997
dc.source.conferencelocationChicago, IL USA
dc.source.endpage1426
dc.title

The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes

dc.typeProceedings paper
dspace.entity.typePublication
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