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Conference contributions
TiSi2 and CoSi2: relevant materials issues for deep sub-micron technologies
Publication:
TiSi2 and CoSi2: relevant materials issues for deep sub-micron technologies
Date
1997
Proceedings Paper
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1982.pdf
107.52 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Maex, Karen
;
Howard, Dave
;
De Wolf, Ingrid
;
Steegen, An
Journal
Abstract
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1923
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Acq. date: 2025-12-08
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Metrics
Views
1923
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-08
Citations