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Materials aspects, electrical performance, and scalability of Ni-silicide towards sub-0.13μm technologies
Publication:
Materials aspects, electrical performance, and scalability of Ni-silicide towards sub-0.13μm technologies
Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lauwers, A.
;
Steegen, An
;
de Potter de ten Broeck, Muriel
;
Lindsay, Richard
;
Satta, Alessandra
;
Bender, Hugo
;
Maex, Karen
Journal
Journal of Vacuum Science & Technology B
Abstract
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1989
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1989
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations