Publication:
Towards Improved Nanosheet-Based Complementary Field Effect Transistor (CFET) Performance Down to 42nm Contacted Gate Pitch
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| dc.contributor.author | Chiarella, Thomas | |
| dc.contributor.author | Matagne, Philippe | |
| dc.contributor.author | Mertens, Hans | |
| dc.contributor.author | Hosseini, Maryam | |
| dc.contributor.author | Zhou, X. | |
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | Arimura, Hiroaki | |
| dc.contributor.author | Gupta, Anshul | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Drijbooms, Chris | |
| dc.contributor.author | Caluwaerts, Rudy | |
| dc.contributor.author | Horiguchi, Naoto | |
| dc.contributor.author | Mitard, Jerome | |
| dc.contributor.imecauthor | Chiarella, T. | |
| dc.contributor.imecauthor | Matagne, P. | |
| dc.contributor.imecauthor | Mertens, H. | |
| dc.contributor.imecauthor | Hosseini, M. | |
| dc.contributor.imecauthor | Zhou, X. | |
| dc.contributor.imecauthor | Eyben, P. | |
| dc.contributor.imecauthor | Arimura, H. | |
| dc.contributor.imecauthor | Gupta, A. | |
| dc.contributor.imecauthor | Richard, O. | |
| dc.contributor.imecauthor | Drijbooms, C. | |
| dc.contributor.imecauthor | Caluwaerts, R. | |
| dc.contributor.imecauthor | Horiguchi, N. | |
| dc.contributor.imecauthor | Mitard, J. | |
| dc.date.accessioned | 2024-09-14T17:21:09Z | |
| dc.date.available | 2024-09-14T17:21:09Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1109/EDTM58488.2024.10512269 | |
| dc.identifier.eisbn | 979-8-3503-7152-9 | |
| dc.identifier.isbn | 979-8-3503-8308-9 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44488 | |
| dc.publisher | IEEE | |
| dc.source.beginpage | 16 | |
| dc.source.conference | 8th Electron Devices Technology & Manufacturing Conference (EDTM) | |
| dc.source.conferencedate | 2024-03-17 | |
| dc.source.conferencelocation | Bangalore | |
| dc.source.endpage | 18 | |
| dc.source.numberofpages | 3 | |
| dc.title | Towards Improved Nanosheet-Based Complementary Field Effect Transistor (CFET) Performance Down to 42nm Contacted Gate Pitch | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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