Publication:

Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings

Date

2015
Proceedings Paper
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dc.contributor.authorDoxastakis, Manolis
dc.contributor.authorSuh, Hyo Seon
dc.contributor.authorChen, Xuanxuan
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorWan, Lingshu
dc.contributor.authorWilliamson, Lance
dc.contributor.authorJiang, Zhang
dc.contributor.authorStrzalka, Joseph
dc.contributor.authorWang, Jin
dc.contributor.authorChen, Wei
dc.contributor.authorFerrier, Nicola
dc.contributor.authorRamirez-Hernandez, Abelardo
dc.contributor.authorde Pablo, Juan
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.contributor.imecauthorSuh, Hyo Seon
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.date.accessioned2021-10-22T19:05:35Z
dc.date.available2021-10-22T19:05:35Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25224
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210992
dc.source.beginpage94241N
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXIX
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.title

Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings

dc.typeProceedings paper
dspace.entity.typePublication
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