Publication:

Sustainable Semiconductor Manufacturing: The Role of Lithography

Date

2024
Journal article
https://doi.org/10.1109/TSM.2024.3416830
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dc.contributor.authorGallagher, Emily
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorRolin, Cedric
dc.contributor.imecauthorGallagher, Emily
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorRolin, Cedric
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecRolin, Cedric::0000-0001-5542-8504
dc.date.accessioned2025-02-04T07:46:17Z
dc.date.available2024-12-03T16:44:53Z
dc.date.available2025-02-04T07:46:17Z
dc.date.issued2024
dc.identifier.doi10.1109/TSM.2024.3416830
dc.identifier.issn0894-6507
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44907
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage440
dc.source.endpage444
dc.source.issue4
dc.source.journalIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
dc.source.numberofpages5
dc.source.volume37
dc.title

Sustainable Semiconductor Manufacturing: The Role of Lithography

dc.typeJournal article
dspace.entity.typePublication
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