Publication:

Evaluation of an advanced organic ultra-low-k material

Date

2009
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorFerchichi, Abdelkarim
dc.contributor.authorTravaly, Youssef
dc.contributor.authorCarbonell, Laure
dc.contributor.authorVanstreels, Kris
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorAsakuma, S.
dc.contributor.authorNakajima, M.
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.date.accessioned2021-10-17T22:12:03Z
dc.date.available2021-10-17T22:12:03Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15301
dc.source.beginpage587
dc.source.conferenceAdvanced Metallization Conference 2008 (AMC 2008)
dc.source.conferencedate23/09/2008
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage592
dc.title

Evaluation of an advanced organic ultra-low-k material

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
18552.pdf
Size:
901.88 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions