Publication:
Metal-gate integration challenges
Date
| dc.contributor.author | Henson, Kirklen | |
| dc.contributor.author | Jurczak, Gosia | |
| dc.contributor.imecauthor | Jurczak, Gosia | |
| dc.date.accessioned | 2021-10-15T13:48:26Z | |
| dc.date.available | 2021-10-15T13:48:26Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9026 | |
| dc.source.beginpage | 1 | |
| dc.source.endpage | 3 | |
| dc.source.issue | 15_3 | |
| dc.source.journal | Semiconductor Fabtech | |
| dc.source.volume | 24 | |
| dc.title | Metal-gate integration challenges | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |