Publication:
Controlling CoSi2 nucleation: the effect of entropy of mixing
Date
| dc.contributor.author | Detavernier, C. | |
| dc.contributor.author | Van Meirhaeghe, R. L. | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Cardon, F. | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T12:54:49Z | |
| dc.date.available | 2021-10-14T12:54:49Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4339 | |
| dc.source.conference | MRS Spring Meeting Symposium: Gate stack and silicide issues in silicon processing; 2000; | |
| dc.source.conferencelocation | ||
| dc.title | Controlling CoSi2 nucleation: the effect of entropy of mixing | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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