Publication:

Composite nanoparticles for defectivity reduction during CMP

Date

2004
Proceedings Paper
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dc.contributor.authorArmini, Silvia
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.accessioned2021-10-15T12:39:13Z
dc.date.available2021-10-15T12:39:13Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8489
dc.source.conferenceAmerican Institute of Chemical Engineers (AIChe) Annual Meeting
dc.source.conferencedate7/11/2004
dc.source.conferencelocationAustin USA
dc.title

Composite nanoparticles for defectivity reduction during CMP

dc.typeProceedings paper
dspace.entity.typePublication
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