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Low frequency noise characterization of 22nm PMOS featuring with filling W gate using different precursors
Publication:
Low frequency noise characterization of 22nm PMOS featuring with filling W gate using different precursors
Date
2017
Proceedings Paper
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39614.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
He, Liang
;
Simoen, Eddy
;
Claeys, Cor
;
Wang, Guilei
;
Luo, Jun
;
Zhao, Chao
;
Li, Junfeng
;
Chen, Hua
;
Hu, Yin
;
Qin, Xiaoting
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1910
since deposited on 2021-10-24
Acq. date: 2025-10-26
Citations
Metrics
Views
1910
since deposited on 2021-10-24
Acq. date: 2025-10-26
Citations