Publication:

Voltage driven electro-thermo-mechanical self-oscillator

Date

2013
Proceedings Paper
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dc.contributor.authorSafouene, Ouenzerfi
dc.contributor.authorTilmans, Harrie
dc.contributor.authorEl-borgi, Sami
dc.contributor.authorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-21T11:40:10Z
dc.date.available2021-10-21T11:40:10Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23031
dc.source.conferenceMicromechanics and Microsystems Europe Conference - MME
dc.source.conferencedate1/09/2013
dc.source.conferencelocationEspoo Finland
dc.title

Voltage driven electro-thermo-mechanical self-oscillator

dc.typeProceedings paper
dspace.entity.typePublication
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