Publication:
Strained Si and strained SiGe fabrication schemes using (selective) epitaxial growth in a RPCVD system
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1920 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-26
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Views
1920 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-26
Citations