Publication:
Impact of carbon-doping on time dependent dielectric breakdown of SiO2-based films
Date
| dc.contributor.author | Zhao, Larry | |
| dc.contributor.author | Barbarin, Yohan | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Verdonck, Patrick | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.imecauthor | Verdonck, Patrick | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
| dc.date.accessioned | 2021-10-23T01:38:11Z | |
| dc.date.available | 2021-10-23T01:38:11Z | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26248 | |
| dc.identifier.url | http://scitation.aip.org/content/aip/journal/apl/106/7/10.1063/1.4913485 | |
| dc.source.beginpage | 72902 | |
| dc.source.issue | 7 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 106 | |
| dc.title | Impact of carbon-doping on time dependent dielectric breakdown of SiO2-based films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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