Publication:

Limits and applications of SIMS in nanoscale technologies

Date

2005
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorJanssens, Tom
dc.contributor.authorGeenen, Luc
dc.contributor.authorConard, Thierry
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorChen, Ping
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-16T06:34:48Z
dc.date.available2021-10-16T06:34:48Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11467
dc.source.conferenceSurface Analysis workshop
dc.source.conferencedate4/10/2005
dc.source.conferencelocationCatania Italy
dc.title

Limits and applications of SIMS in nanoscale technologies

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions