Publication:

Characterization of low energy (2-5keV) implantation into Si

Date

2002
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorCollart, E.J.
dc.contributor.authorKirkwood, D.
dc.contributor.authorVandenberg, J.A.
dc.contributor.authorWerner, M.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBrijs, Bert
dc.contributor.authorBailey, P.
dc.contributor.authorNoakes, T.C.Q.
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-14T21:16:05Z
dc.date.available2021-10-14T21:16:05Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6130
dc.source.conferenceIon Implantation Conference
dc.source.conferencedate22/09/2002
dc.source.conferencelocationTaos, NM USA
dc.title

Characterization of low energy (2-5keV) implantation into Si

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations