Publication:
Sputtering Phenomena of CoSi2 and TiSi2 under Low Energy Oxygen Bombardment
Date
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | De Coster, Walter | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-29T12:39:58Z | |
| dc.date.available | 2021-09-29T12:39:58Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/63 | |
| dc.source.conference | 13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U | |
| dc.title | Sputtering Phenomena of CoSi2 and TiSi2 under Low Energy Oxygen Bombardment | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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