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FinFET EOT extraction from accumulation capacitance measurements

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dc.contributor.authorHiblot, Gaspard
dc.contributor.imecauthorHiblot, Gaspard
dc.contributor.orcidimecHiblot, Gaspard::0000-0002-3869-965X
dc.date.accessioned2021-10-25T19:49:24Z
dc.date.available2021-10-25T19:49:24Z
dc.date.issued2018
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30890
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8278829/
dc.source.beginpage874
dc.source.endpage880
dc.source.issue3
dc.source.journalIEEE Transactions on Electron Devices
dc.source.volume65
dc.title

FinFET EOT extraction from accumulation capacitance measurements

dc.typeJournal article
dspace.entity.typePublication
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