Publication:
FinFET EOT extraction from accumulation capacitance measurements
Date
| dc.contributor.author | Hiblot, Gaspard | |
| dc.contributor.imecauthor | Hiblot, Gaspard | |
| dc.contributor.orcidimec | Hiblot, Gaspard::0000-0002-3869-965X | |
| dc.date.accessioned | 2021-10-25T19:49:24Z | |
| dc.date.available | 2021-10-25T19:49:24Z | |
| dc.date.issued | 2018 | |
| dc.identifier.issn | 0018-9383 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30890 | |
| dc.identifier.url | https://ieeexplore.ieee.org/document/8278829/ | |
| dc.source.beginpage | 874 | |
| dc.source.endpage | 880 | |
| dc.source.issue | 3 | |
| dc.source.journal | IEEE Transactions on Electron Devices | |
| dc.source.volume | 65 | |
| dc.title | FinFET EOT extraction from accumulation capacitance measurements | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |