Publication:

Trapping in 1nm EOT high-k dielectrics

Date

2008
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorPantisano, Luigi
dc.contributor.authorZahid, Mohammed
dc.contributor.authorDegraeve, Robin
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.date.accessioned2021-10-17T09:34:55Z
dc.date.available2021-10-17T09:34:55Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14266
dc.source.beginpage1928
dc.source.conference214th ECS Meeting
dc.source.conferencedate10/10/2008
dc.source.conferencelocationHonolulu, HI USA
dc.title

Trapping in 1nm EOT high-k dielectrics

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
17124.pdf
Size:
170.74 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions