Publication:
Fabrication technology for silicon based microprobe arrays used in acute and subchronic neural recording
Date
| dc.contributor.author | Herwik, Stanislav | |
| dc.contributor.author | Kisban, Sebastian | |
| dc.contributor.author | Aarts, Arno | |
| dc.contributor.author | Seidl, Karsten | |
| dc.contributor.author | Girardeau, G. | |
| dc.contributor.author | Benchenane, K. | |
| dc.contributor.author | Zugaro, M.B. | |
| dc.contributor.author | Wiener, S.I. | |
| dc.contributor.author | Pereira Neves, Hercules | |
| dc.contributor.author | Paul, Olivier | |
| dc.contributor.author | Ruther, Patrick | |
| dc.contributor.imecauthor | Aarts, Arno | |
| dc.date.accessioned | 2021-10-17T07:39:55Z | |
| dc.date.available | 2021-10-17T07:39:55Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13872 | |
| dc.source.beginpage | 57 | |
| dc.source.conference | 19th MicroMechanics Europe Workshop - MME | |
| dc.source.conferencedate | 28/09/2008 | |
| dc.source.conferencelocation | Aachen Germany | |
| dc.source.endpage | 60 | |
| dc.title | Fabrication technology for silicon based microprobe arrays used in acute and subchronic neural recording | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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