Publication:

Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing

Date

2017
Journal article
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dc.contributor.authorSun, Yiting
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorVaesen, Inge
dc.contributor.authorConard, Thierry
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorMoinpour, Mansour
dc.contributor.authorDe Feyter, Steven
dc.contributor.authorArmini, Silvia
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorVaesen, Inge
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.accessioned2021-10-24T14:28:36Z
dc.date.available2021-10-24T14:28:36Z
dc.date.issued2017
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29526
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931716304439
dc.source.beginpage32
dc.source.endpage36
dc.source.journalMicroelectronic Engineering
dc.source.volume137
dc.title

Optimization and upscaling of spin coating with organosilane monolayers for low-k pore sealing

dc.typeJournal article
dspace.entity.typePublication
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