Publication:
In-situ growth of Cu-Mn alloy self-forming barriers in 100 nm Cu/Low-k damascene interconnects
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1973 since deposited on 2021-10-18
Acq. date: 2026-06-07
Citations
Statistics
Views
1973 since deposited on 2021-10-18
Acq. date: 2026-06-07
Citations