Publication:

A comb based in-plane SiGe capacitive accelerometer for above-IC integration

Date

2010
Proceedings Paper
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dc.contributor.authorWen, Lianggong
dc.contributor.authorWouters, Kristof
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorPuers, Bob
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorPuers, Bob
dc.date.accessioned2021-10-19T00:23:54Z
dc.date.available2021-10-19T00:23:54Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18346
dc.source.beginpage212
dc.source.conference21st Micromechanics and Microsystems Europe Workshop - MME
dc.source.conferencedate26/09/2010
dc.source.conferencelocationEnschede The Netherlands
dc.source.endpage215
dc.title

A comb based in-plane SiGe capacitive accelerometer for above-IC integration

dc.typeProceedings paper
dspace.entity.typePublication
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